Method for forming a field effect transistor having a high-k gate dielectric

ABSTRACT

According to one exemplary embodiment, a method for forming a field effect transistor over a substrate comprises a step of forming an interfacial oxide layer over a channel region of the substrate, where the interfacial oxide layer has a first thickness. The interfacial oxide layer can prevent a high-k element from diffusing into the channel region. The method further comprises forming an oxygen-attracting layer over the interfacial oxide layer, where the oxygen-attracting layer prevents the first thickness of the interfacial oxide layer from increasing. The oxygen-attracting layer is formed by forming a metal layer over the interfacial oxide layer, where the metal layer combines with oxygen to form a silicate. The oxygen-attracting layer may be zirconium silicate or hafnium silicate, for example. The method further comprises forming a high-k dielectric layer over the oxygen-attracting layer. The method further comprises forming a gate electrode layer over the high-k dielectric layer.

This is a divisional of application Ser. No. 10/618,273 filed Jul. 11,2003, now U.S. Pat. No. 6,797,572.

1. TECHNICAL FIELD

The present invention is generally in the field of semiconductordevices. More particularly, the present invention is in the field offabrication of field effect transistors.

2. BACKGROUND ART

As field effect transistors (“FET”), such as metal-oxide semiconductorFETs (“MOSFET”), are scaled down in size, semiconductor manufactureshave utilized gate dielectrics having a high dielectric constant(“high-k”) to improve FET performance and reliability. High-k gatedielectrics are desirable in small feature size technologies sinceconventional gate dielectrics, such as silicon dioxide (“SiO₂”), are toothin and they result in high tunneling current, as well as otherproblems, which decrease performance and reliability of FETs. High-kdielectrics, such as hafnium oxide (“HfO”) and zirconium oxide (“ZrO”),have a dielectric constant equal to approximately 24, while SiO₂ has adielectric constant equal to approximately 4. As a result, theequivalent oxide thickness (“EOT”) for HfO and ZrO is approximately ⅙ ofthe thickness of SiO₂. By way of background, “EOT” refers to thethickness of any dielectric scaled by the ratio of its dielectricconstant to the dielectric constant of SiO₂. Thus, by utilizing high-kgate dielectrics, semiconductor manufactures can achieve FETs havingdesirably thin gate dielectrics having a thickness that is equivalent toa much greater thickness of SiO₂. However, conventional processes forfabricating FETs having high-k gate dielectrics can cause an undesirableincrease in interfacial oxide thickness and carrier mobility degradationin the channel region.

In a conventional process for fabricating a FET having a high-kdielectric, a high-k dielectric, such as HfO or ZrO, is formed over achannel region of a silicon substrate. The high-k dielectric comprises ahigh-k element, such as Hf or Zr, which is combined with oxygen.However, excessive oxygen from the high-k dielectric combines withsilicon on the surface of the silicon substrate to form a low-qualityinterfacial oxide layer between the silicon substrate and the high-kdielectric. The resulting low-quality interfacial oxide layer causes anundesirable increase in thickness of the gate dielectric, which includesthe high-k dielectric and the low-quality interfacial oxide layer.Additionally, the high-k element in the high-k gate dielectric candiffuse into the channel region and, thereby, cause undesirable carriermobility degradation.

Thus, there is a need in the art for a method for fabricating a high-kgate dielectric in a field effect transistor without causing anundesirable increase in gate dielectric thickness or carrier mobilitydegradation.

SUMMARY

The present invention is directed to method for forming a field effecttransistor having a high-k gate dielectric and related structure. Thepresent invention addresses and resolves the need in the art for amethod for fabricating a high-k gate dielectric in a field effecttransistor without causing an undesirable increase in gate dielectricthickness or carrier mobility degradation.

According to one exemplary embodiment, a method for forming a fieldeffect transistor over a substrate comprises a step of forming aninterfacial oxide layer over a channel region of the substrate, wherethe interfacial oxide layer has a first thickness. The interfacial oxidelayer can prevent a high-k element from diffusing into the channelregion. The first thickness of the interfacial oxide layer may be, forexample, between approximately 4.0 Angstroms and approximately 5.0Angstroms.

According to this exemplary embodiment, the method further comprisesforming an oxygen-attracting layer over the interfacial oxide layer,where the oxygen-attracting layer prevents the first thickness of theinterfacial oxide layer from increasing. The oxygen-attracting layer isformed by forming a metal layer over the interfacial oxide layer, wherethe metal layer combines with oxygen to form a silicate. Theoxygen-attracting layer may be zirconium silicate or hafnium silicateand can have a thickness of approximately 5.0 Angstroms, for example.The method further comprises forming a high-k dielectric layer over theoxygen-attracting layer. The high-k dielectric layer may be, forexample, hafnium oxide, hafnium silicate, zirconium silicate, orzirconium oxide. The method further comprises forming a gate electrodelayer over the high-k dielectric layer. In one embodiment, the inventionis a field effect transistor fabricated by utilizing the above-discussedmethod. Other features and advantages of the present invention willbecome more readily apparent to those of ordinary skill in the art afterreviewing the following detailed description and accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a cross-sectional view of a structure including anexemplary field-effect transistor, in accordance with one embodiment ofthe present invention.

FIG. 2 illustrates a cross-sectional view of a structure including anexemplary field-effect transistor, in accordance with one embodiment ofthe present invention.

FIG. 3 is a flowchart corresponding to exemplary method steps accordingto one embodiment of the present invention.

FIG. 4 is a flowchart corresponding to exemplary method steps accordingto one embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention is directed to method for forming a field effecttransistor having a high-k gate dielectric and related structure. Thefollowing description contains specific information pertaining to theimplementation of the present invention. One skilled in the art willrecognize that the present invention may be implemented in a mannerdifferent from that specifically discussed in the present application.Moreover, some of the specific details of the invention are notdiscussed in order not to obscure the invention.

The drawings in the present application and their accompanying detaileddescription are directed to merely exemplary embodiments of theinvention. To maintain brevity, other embodiments of the presentinvention are not specifically described in the present application andare not specifically illustrated by the present drawings.

FIG. 1 shows a cross-sectional view of an exemplary structure includingan exemplary FET in accordance with one embodiment of the presentinvention. Structure 100 includes FET 102, which is situated onsubstrate 104. FET 102 includes gate electrode layer 106, gatedielectric stack 108, source 110, drain 112, and channel region 114.Gate dielectric stack 108 includes high-k dielectric layer 116 andoxygen attracting layer 118. In the present embodiment, FET 102 can bean NFET or a PFET. In one embodiment, FET 102 can be a MOSFET, such asan NMOS or PMOS transistor.

As shown in FIG. 1, source 110 and drain 112, which are formed in amanner known in the art, are situated in substrate 104 and channelregion 114 is situated between source 110 and drain 112. Further shownin FIG. 1, high-k dielectric layer 116 is situated over channel region114 on top surface 120 of substrate 104. High-k dielectric layer 116 canbe deposited over substrate 104 utilizing a chemical vapor deposition(“CVD”) process or other appropriate processes and can comprise hafniumoxide or zirconium oxide. By way of example, high-k dielectric layer 116can have a thickness of between approximately 20.0 Angstroms andapproximately 30.0 Angstroms.

Also shown in FIG. 1, oxygen-attracting layer 118 is situated overhigh-k dielectric layer 116 and can comprise hafnium oxide or zirconiumoxide. Oxygen-attracting layer 118 can be formed by depositing a metallayer comprising hafnium, zirconium, or other suitable metal over high-kdielectric layer 116 utilizing a CVD process or other appropriateprocesses. The metal in the metal layer attracts excessive oxygen fromhigh-k dielectric layer 116 such that the metal is converted into ahigh-k dielectric such as hafnium oxide or zirconium oxide. For example,if the metal layer comprises hafnium or zirconium, the hafnium orzirconium would be converted into hafnium oxide or zirconium oxide,respectively. In one embodiment, oxygen-attracting layer 118 comprisesan unconverted portion of metal, such as hafnium or zirconium, and aportion of converted metal comprising hafnium oxide or zirconium oxide,respectively. By way of example, oxygen-attracting layer 118 can have athickness of approximately 5.0 Angstroms. Further shown in FIG. 1, gateelectrode layer 106 is situated over oxygen-attracting layer 118. Gateelectrode 106 can comprise polycrystalline silicon or other suitablematerial, which can be deposited over oxygen-attracting layer 118utilizing a CVD process or other appropriate processes. By way ofexample, gate electrode 106 can have a thickness of between 800.0Angstroms and 2000.0 Angstroms.

By forming oxygen-attracting layer 118 over high-k dielectric layer 116,the present invention advantageously prevents an undesirable low-qualityinterfacial oxide layer from forming between high-k dielectric layer 116and substrate 104. As a result, the present invention advantageouslyachieves a FET, i.e. FET 102, having a high-k gate dielectric stack,i.e. gate dielectric stack 108, where the high-k gate dielectric stackhas a desirably low EOT.

FIG. 2 shows a cross-sectional view of an exemplary structure includingan exemplary FET in accordance with one embodiment of the presentinvention. Structure 200 includes FET 202, which is situated onsubstrate 204. FET 202 includes gate electrode layer 206, interfacialoxide layer 222, oxygen attracting layer 224, high-k dielectric layer226, source 210, drain 212, and channel region 214. Similar to FET 102,FET 202 can be an NFET or a PFET. In one embodiment, FET 202 can be aMOSFET, such as an NMOS or PMOS transistor. In structure 200 in FIG. 2,substrate 204, gate electrode layer 206, source 210, drain 212, andchannel region 214 correspond, respectively, to substrate 104, gateelectrode layer 106, source 110, drain 112, and channel region 114 instructure 100.

As shown in FIG. 2, interfacial oxide layer 222 is situated over channelregion 214 on top surface 220 of substrate 204. Interfacial oxide layer222 can comprise a thin layer of silicon dioxide, which can be grownover substrate 204 by utilizing a thermal or plasma comprising nitrogenoxide, such as NO, N₂O, or NO₂, or oxygen. By way of example,interfacial oxide layer 222 can have a thickness of betweenapproximately 4.0 Angstroms and approximately 5.0 Angstroms. Also shownin FIG. 2, oxygen-attracting layer 224 is situated over interfacialoxide layer 222 and can comprise a silicate, such as zirconium silicateor hafnium silicate. Oxygen-attracting layer 224 can be formed bydepositing a metal layer comprising hafnium, zirconium, or othersuitable metal over interfacial oxide layer 222 utilizing a CVD processor other appropriate processes. The metal in the metal layer attractsand combines with excessive oxygen from oxide layer 222 and high-kdielectric layer 226 to form a silicate, such as zirconium silicate orhafnium silicate, which is determined by the particular metal utilizedto form the metal layer. For example, if hafnium were utilized to formthe metal layer, the hafnium would combine with the excessive oxygen toform hafnium silicate. By way of example, oxygen-attracting layer 224can have a thickness of approximately 5.0 Angstroms.

Also shown in FIG. 2, high-k dielectric layer 226 is situated overchannel region 214 on top surface 220 of substrate 204. High-kdielectric layer 226 can be deposited over substrate 204 by utilizing aCVD process or other appropriate processes and can comprise hafniumoxide, hafnium silicate, zirconium oxide, or zirconium silicate. By wayof example, high-k dielectric layer 226 can have a thickness ofapproximately 10.0. Further shown in FIG. 2, gate electrode layer 206 issituated over high-k dielectric layer 226 and is substantially similarin composition, thickness, and formation to gate electrode layer 106 instructure 100 in FIG. 1.

By growing a high-quality thin oxide layer, i.e. interfacial oxide layer222, over substrate 204, the present invention prevents high-k elements,such as hafnium or zirconium, in high-k dielectric layer 226 andoxygen-attracting layer 224 from diffusing into channel region 214 insubstrate 204. As a result, the present invention advantageously reducescarrier mobility degradation in channel region 214 of FET 202.Additionally, by forming oxygen-attracting layer 224 over interfacialoxide layer 222 to attract excessive oxygen from interfacial oxide layer222 and high-k dielectric layer 226, the present invention prevents anundesirable increase in thickness of the interfacial oxide layer, i.e.interfacial oxide layer 222, of FET 202.

Referring to FIG. 3, an example of a method by which FET 102 instructure 100 in FIG. 1 is fabricated is now discussed. Certain detailsand features have been left out of flowchart 300 that are apparent to aperson of ordinary skill in the art. At step 302, high-k dielectriclayer 116 is formed over channel region 114 in substrate 104, which issituated in a semiconductor wafer. For example, high-k dielectric layer116 can be formed by utilizing a CVD process to deposit a high-kdielectric, such as hafnium oxide or zirconium oxide, over substrate104. At step 304, oxygen-attracting layer 118 is formed over high-kdielectric layer 116. Oxygen-attracting layer 118 can be formed by, forexample, utilizing a CVD process to deposit a layer of metal, such ashafnium or zirconium, over high-k dielectric layer 116. The layer ofmetal is converted into a high-k dielectric, such as hafnium oxide orzirconium oxide, by attracting and combining with excessive oxygen fromhigh-k dielectric layer 116. At step 306, gate electrode layer 106 isformed over oxygen-attracting layer 118. For example, gate electrodelayer 106 can be formed by utilizing a CVD process to deposit a layer ofpolycrystalline silicon over oxygen-attracting layer 118.

Referring to FIG. 4, an example of a method by which FET 202 instructure 200 in FIG. 2 is fabricated is now discussed. Certain detailsand features have been left out of flowchart 400 that are apparent to aperson of ordinary skill in the art. At step 402, interfacial oxidelayer 222 is formed over channel region 214 in substrate 204. Forexample, interfacial oxide layer 222 can be formed by utilizing athermal or plasma comprising nitrogen oxide, such as NO, N₂O, or NO₂, togrow a thin layer of silicon dioxide over substrate 204. At step 404,oxygen-attracting layer 224 is formed over interfacial oxide layer 222.For example, oxygen-attracting layer 224 can be formed by utilizing aCVD process to deposit a metal layer comprising hafnium or zirconiumover interfacial oxide layer 222. The hafnium or zirconium in the metallayer then combines with excessive oxygen from interfacial oxide layer222 and subsequently formed high-k dielectric layer 226 to form hafniumsilicate or zirconium silicate, respectively. At step 406, high-kdielectric layer 226 is formed by utilizing, for example, a CVD processto deposit a high-k dielectric, such as hafnium oxide or zirconiumoxide, over oxygen-attracting layer 224. At step 408, gate electrodelayer 206 is formed over high-k dielectric layer 226. For example, gateelectrode layer 206 can be formed by utilizing a CVD process to deposita layer of polycrystalline silicon over high-k dielectric layer 226.

Thus, in an embodiment of the present invention shown in FIG. 1, thepresent invention utilizes an oxygen-attracting layer to preventformation of an undesirable low-quality interfacial oxide layer. As aresult, the present invention advantageously achieves a FET having ahigh-k gate dielectric stack, where the high-k gate dielectric stack hasa desirably low EOT. In an embodiment of the present invention show inFIG. 2, the present invention achieves reduced carrier mobilitydegradation in a channel region of a FET by utilizing a high-qualityinterfacial layer to prevent a high-k element in a high-k dielectriclayer from diffusing into the channel region. Additionally, in theembodiment shown in FIG. 2, the present invention utilizes anoxygen-attracting layer to attract excessive oxygen and, thus, toprevent an undesirable increase in thickness of an interfacial oxidelayer.

From the above description of exemplary embodiments of the invention itis manifest that various techniques can be used for implementing theconcepts of the present invention without departing from its scope.Moreover, while the invention has been described with specific referenceto certain embodiments, a person of ordinary skill in the art wouldrecognize that changes could be made in form and detail withoutdeparting from the spirit and the scope of the invention. The describedexemplary embodiments are to be considered in all respects asillustrative and not restrictive. It should also be understood that theinvention is not limited to the particular exemplary embodimentsdescribed herein, but is capable of many rearrangements, modifications,and substitutions without departing from the scope of the invention.

Thus, method for forming a field effect transistor having a high-k gatedielectric and related structure have been described.

1. A method for forming a field effect transistor over a substrate, saidmethod comprising steps of: forming a high-k dielectric layer over achannel region of said substrate; forming an oxygen-attracting layerover said high-k dielectric layer; forming a gate electrode layer oversaid oxygen-attracting layer; wherein said oxygen-attracting layerprevents an interfacial oxide layer from forming between said high-kdielectric layer and said substrate.
 2. The method of claim 1 whereinsaid step of forming said oxygen-attracting layer comprises forming ametal layer over said high-k dielectric layer, said metal layercombining with oxygen from said high-k dielectric layer to form a high-kdielectric.
 3. The method of claim 1 wherein said oxygen-attractinglayer and said high-k dielectric layer form a high-k gate dielectricstack.
 4. The method of claim 1 wherein said oxygen-attracting layer isselected from the group consisting of zirconium oxide and hafnium oxide.5. The method of claim 1 wherein said high-k dielectric layer isselected from the group consisting of zirconium oxide and hafnium oxide.6. The method of claim 1 wherein said oxygen-attracting layer has athickness of approximately 5.0 Angstroms.
 7. The method of claim 1wherein said high-k dielectric layer has a thickness of betweenapproximately 20.0 Angstroms and approximately 30.0 Angstroms.